Abstract
Hard, adherent, and low-friction silicon containing diamond-like carbon coatings (Si-DLC) have been synthesized by 40 keV Ar + ion beam assisted deposition (IBAD) of tetraphenyl-tetramethyl-trisiloxane oil, on 8.90 cm (3.5 in) diameter aluminum alloy substrates. The Si-DLC coatings were implanted with nitrogen ions to doses of 3×10 15, 3×10 16, and 3×10 17 ions/cm 2. The Si-DLC coating synthesis and the subsequent nitrogen ion implantation at 80 keV took place in a non-mass analyzed ion implanter. The thickness of the implanted coatings, measured with the aid of a profilometer, remained equal to the thickness of the unimplanted coating, and photon tunneling microscopy showed some surface roughening from the implantation process. The unlubricated steel ball-on-disk friction coefficient increased with increasing implant dose. However, the wear rate of the coating, determined with the aid of an optical microscope and a stylus profilometer, decreased with increasing implant dose.
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