Abstract
We proposed a new micro-calorimetric detector with four single electron transistor (SET) read-out circuits that aimed the real-time detector with spatial resolution of 100 nm. The new detector consists of two layers of the micro-calorimeters. The top layer had four SETs, which worked as thermometers to decide the photoelectron position by the difference of each SET's temperature caused by heat flow in the layer. We investigated the SET performance and the heat flow in the substrate at cryogenic temperature. From calculational results, the temperature resolution of 10 mK could be achieved with a pico-ammeter having 5.0 /spl times/ 10/sup -9/S sensitivity. Also, the detector configuration achieving the 100 nm spatial and 8 /spl mu/ second time resolution was successfully designed.
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