Abstract
A new method for analysis of deep level transient spectroscopy signals was applied to the study of deep levels in Au/n-InP Schottky diodes. The spectra were compared using Lang's method and the correlation with Crowell first-order filters, applied to the capacitance transients. The better resolution of Lang's method compared with the correlation with Crowell's filters seems to have great improtance for the quality of the spectrum. The discrepancies between these spectra, for instance the peak width on one side, are clearly shown using the five emission rate method. This method gives us more information about the spectra, for instance the presence of closely spaced levels giving overlapping spectra on both sides. It is possible to use these results when calculating the activation energy and the capture cross-section from the Arrhenius plot, thus increasing the accuracy.
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