Abstract
In glow discharge optical emission spectrometry (GD-OES), approximation of matrix independent emission yields has frequently been used, in which the emission intensity of an atomic line is proportional to the product of the concentration of the corresponding element and the sputtering rate of the sample. If calibration data obtained with GD-OES for several elements are available, it is possible with this approximation to determine the sputtering rates for calibration samples by the procedure described, termed multi-element calibration. An example of multi-element calibration is presented for high-speed tool steels. Possible consequences for the quantification of GD-OES analyses are discussed.
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