Abstract

AbstractWe report new measurements of the surface ionization Φ(0) for Ge Kα and Lα X‐rays on an Fe substrate, Ga Kα and Lα X‐rays on an Ni substrate, and Au Mα X‐rays on Si, W and Ta substrates. The measurements were performed using the tracer technique for electron incident energies ranging from the ionization threshold up to about 40 keV. Improvements in sample preparation and in the X‐ray measurement technique enabled surface ionization values to be obtained with uncertainties less than 2%. Simulations of Φ(0) for the studied cases were performed using the general‐purpose Monte Carlo (MC) code PENELOPE. Experimental measurements are compared with simulation results and with the results of several predictive formulae widely used in electron probe microanalysis and Auger electron spectroscopy (AES). The accuracy of the reported measurements makes it possible to assess the reliability of the different calculations for incident electron energies below 10 keV. Copyright © 2011 John Wiley & Sons, Ltd.

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