New approach suggesting a sensor selection procedure for hazardous substances used in the semiconductor industry

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Abstract
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This study has developed a sensor selection procedure for quickly confirming hazardous chemical exposure levels for electronics industry workers. We reviewed several papers and documents to determine the chemical substances used in semiconductor manufacturing. To source information about high-use and high-risk substances and the amounts of chemicals used in semiconductor manufacturing, we utilized chemical data from the Korea Ministry of the Environment and the Korea Occupational Safety and Health Agency. The method used to select chemicals involved assigning weights to hazardous substances and selecting those with high scores ultimately for the development of sensors. During the manufacturing of semiconductors, sensors are needed for hydrogen fluoride, chlorine, phosphine, carbon monoxide, hydrogen chloride, hydrogen peroxide and ammonia. Overall, the proposed procedure provides a practical and systematic framework for prioritizing hazardous chemicals and supporting sensor selection based on actual industrial usage and risk, thereby enhancing the applicability of real-time chemical monitoring in semiconductor manufacturing.

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  • Discussion
  • Cite Count Icon 1
  • 10.1097/jom.0000000000000589
Author Response to Drs Paek and Gassert.
  • Nov 1, 2015
  • Journal of Occupational & Environmental Medicine
  • Rachel M Jones + 6 more

To the Editor: We appreciate the opportunity to respond to the letter of Drs Paek and Gassert regarding our article, Exposure Reconstruction and Risk Analysis for Six Semiconductor Workers with Lymphohematopoietic Cancers.5 There is an ongoing public controversy about the health of workers at Samsung facilities in South Korea, and more broadly the semiconductor industry, in which the Korea Occupational Safety and Health Agency (KOSHA),1–4 Korea Workers’ Compensation and Welfare Service (K-Comwel), and the South Korean courts have been involved. Controversial topics often prompt debate about the interpretation of scientific approaches and methods, as well as elicit emotional reactions. In fact, there are many scientifically challenging questions as well as policy questions relevant to the controversy over the role of workplace exposures in the cancers diagnosed in Samsung workers. In our study,5 we posed the following specific research question: Are occupational exposures to recognized lymphohematopoietic (LH) carcinogens possibly related to the cancers of six workers? We approached this question using exposure reconstruction, risk assessment, and literature review. Drs Paek and Gassert reiterated the methods of our study, but misstated some details. We used a published method to identify process changes that might influence exposure potential.6 After process review and statistical analysis did not identify evidence of temporal trends, summary exposure measures were based on pooled data from ENVIRON and the company. Workers were matched to similar exposure groups based on both company records and KOSHA records, which included interviews with the workers, their families, and/or coworkers. In the absence of exposure measurements for certain LH carcinogens, mathematical models of exposure were developed. Mathematical models are commonly used in individual-level exposure reconstruction, and the model used—the two-zone model—is commonly used for assessing exposures to volatile organic solvents.7,8 We chose the 75th and 95th percentile values to conservatively assess the range of exposures that workers in a similar exposure group may have had to this carcinogen. Readers interested in exposure and associated risk of specific cancers at percentiles other than the 75th and 95th can calculate these values from the data provided. We sought to transparently describe our methods and results, and to enumerate the limitations of our findings. We posed a clearly stated research question and purpose, and used reliable, relevant, and reproducible methodological approaches to gain an understanding about potential occupational exposures in selected semiconductor facilities. Although risk assessment is often focused on populations, our application of risk assessment approaches was intended to provide additional information about the implications of the quantified exposures at the individual level. Only properly designed and executed epidemiological studies looking at specific agents or jobs (and accounting for lifestyle, genetics, environmental exposures, and other factors affecting disease incidence and mortality) would be able to identify new associations between work in the semiconductor industry and LH cancers. This approach is in contrast to a risk assessment, which is limited to agents for which unit risk values exist. In practice, exposures at Samsung could be reconstructed for a multitude of agents—including all those for which risk unit values do not exist currently—for application in future epidemiological studies, drawing upon a comprehensive exposure characterization.9 KOSHA has conducted an epidemiological study of cancer in the Korean semiconductor industry, and found statistically significantly elevated incidence of non-Hodgkin lymphoma among women, but not men.2 Non-Hodgkin lymphoma incidence was not associated with the duration of work, and no other LH cancer incidence or mortality was statistically significant. As identified by Lee et al,2 the study was limited by the use of exposure surrogates, the small numbers of certain cancers, and young age of the cohort. All cancer diagnoses are fraught with emotion. Fear and anger are natural responses, as is the inclination to allocate blame. Scientific progress, however, hinges on our cognitive ability to challenge existing theories and beliefs using scientific methods, to openly debate the strengths and limitations of these methods, and to form new hypotheses that aim to refute new scientific findings. There is a body of peer-reviewed work that has studied occupational health in the semiconductor industry, and with that there remain many scientific research questions that could be relevant to characterizing workplace exposures, in South Korea and globally. We look forward to these new data and information.

  • Research Article
  • Cite Count Icon 8
  • 10.5143/jesk.2010.29.4.505
고령화 사회의 근골격계질환관련 대응전략
  • Aug 31, 2010
  • Journal of the Ergonomics Society of Korea
  • Yeong-Ae Yang

The purpose of this study was to show the occurrences of musculoskeletal disease in aging society and basic information on developments of a systematic prevention program and proposed management measures needed to prevent the disease. The Korea Occupational Safety & Health Agency has analyzed cases of industrial accidents that cause musculoskeletal disease, from 1998 to 2007. They found 30,439 people suffering from the disease during those ten years. This information is from the Ministry of Labor's industrial accident analysis and the industrial accident survey from the Korea Occupational Safety & Health Agency. The data was analyzed by age and industrial classification. In Korea, according to the studies on aging society, the occurrence of musculoskeletal disease in elderly employee's have increased, so prevention programs are needed. Psychological, mental and cognitive programs are needed, as well as other prevention programs to ensure health in old age. In this study, we were able to see the state of musculoskeletal disease in aging society and the countermeasures to prevent the disease, such as a universal design, guarantees, and recuperation services. Later, we found that studying the various elderly patients would be of great help to us.

  • Research Article
  • Cite Count Icon 1
  • 10.15269/jksoeh.2014.24.4.425
산업안전보건법상 관리대상 유해물질 선정기준 마련에 관한 연구
  • Dec 31, 2014
  • Journal of Korean Society of Occupational and Environmental Hygiene
  • Eun Woo Park + 5 more

Objectives: This study was performed in order to establish reliable and relative selection criteria for hazardous substances requiring management(HSRM) in the Occupational Safety and Health Act in Korea. Methods: To determine the relative criteria and weight of evidence for HSRM, we analyzed the difference between the selection method of priority substances in studies by KOSHA(Korea Occupational Safety and Health Agency) and the European Union Risk Ranking Method(EURAM). In addition, 597 hazardous substances with exposure limit valueswereanalyzed and the posted health hazards classification by MOEL(Ministry of Employee and Labor), MOE(Ministry of Environment), and EU CLP(Classification, Labelling and Packaging regulation) were compared based on GHS(Globally Harmonized System of classification and labelling of chemicals) criteria. The existing HSRM(167 substances) were evaluated for suitability by the proposed criteria in this study. Results: As a result of this study, the criteria and procedures for selecting HSRM in the Occupational Safety and Health Act were arranged utilizing GHS health hazard classification results, occupational disease cases and domestic use situations. Conclusions: The applicability of the proposed criteria was proved via the evaluation of existing HSRM(167 substances). Most HSRM (161 substances) were found to correspond to a significant health effect or substantial health effect. The question of whether to include the six substances that have been found to have general health effects as HSRM would be require further research.

  • Research Article
  • Cite Count Icon 1
  • 10.35371/aoem.2023.35.e35
Comparing Korea Occupational Safety & Health Agency and National Health Insurance Service’s cardio-cerebrovascular diseases risk-assessment tools using data from one hospital’s health checkups
  • Aug 21, 2023
  • Annals of Occupational and Environmental Medicine
  • Yunrae Cho + 4 more

BackgroundCardio-cerebrovascular diseases (CVDs) are the most common cause of death worldwide. Various CVD risk assessment tools have been developed. In South Korea, the Korea Occupational Safety & Health Agency (KOSHA) and the National Health Insurance Service (NHIS) have provided CVD risk assessments with health checkups. Since 2018, the KOSHA guide has stated that NHIS CVD risk assessment tool could be used as an alternative of KOSHA assessment tool for evaluating CVD risk of workers. The objective of this study was to determine the correlation and agreement between the KOSHA and the NHIS CVD risk assessment tools.MethodsSubjects of this study were 17,485 examinees aged 20 to 64 years who had undergone medical examinations from January 2021 to December 2021 at a general hospital. We classified subjects into low-risk, moderate-risk, high-risk, and highest-risk groups according to KOSHA and NHIS’s CVD risk assessment tools. We then compared them with cross-analysis, Spearman correlation analysis, and linearly weighted kappa coefficient.ResultsThe correlation between KOSHA and NHIS tools was statistically significant (p-value < 0.001), with a correlation coefficient of 0.403 and a kappa coefficient of 0.203. When we compared risk group distribution using KOSHA and NHIS tools, CVD risk of 6,498 (37.1%) participants showed a concordance. Compared to the NHIS tool, the KOSHA tool classified 9,908 (56.7%) participants into a lower risk category and 1,079 (6.2%) participants into a higher risk category.ConclusionsIn this study, KOSHA and NHIS tools showed a moderate correlation with a fair agreement. The NHIS tool showed a tendency to classify participants to higher CVD risk group than the KOSHA tool. To prevent CVD more effectively, a higher estimation tool among verified CVD risk assessment methods should be selected and managements such as early intervention and treatment of risk factors should be performed targeting the high-risk group.

  • Research Article
  • Cite Count Icon 23
  • 10.1016/j.shaw.2018.08.001
Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry
  • Aug 18, 2018
  • Safety and Health at Work
  • Miyeon Jang + 3 more

Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry

  • Research Article
  • Cite Count Icon 2
  • 10.5345/jkibc.2015.15.6.621
건설현장 작업자를 위한 3차원 시뮬레이션 바탕의 안전 교육전달 매체 개발
  • Dec 20, 2015
  • Journal of the Korea Institute of Building Construction
  • Sungjin Ahn + 3 more

건설 산업에 있어 작업자 안전은 지속적으로 중요시 되고 있다. 안전교육의 수준제고를 안전교육 내용매체 개선을 통한 효율성 증진과 전달 매체 수준 향상에 의한 효과성 증진을 통해 이루어 질 수 있다. 본 연구에서는 선별된 공종별 안전재해유형 내용을 바탕으로 건설현장의 3차원 시뮬레이션의 안전교육 자료를 개발하였다. 안전교육 내용매체는 안전보건기술 지침과 미 산업안전보건청의 건설 산업 안전규정을 토대로 재해유형을 선별하였으며 교육 전달 매체로 3차원 시뮬레이션 기술을 이용하여 제공하였다. 제시된 교육 자료의 적절성을 평가하기위해 건설현장의 안전관리 전문가의 설문조사를 토대로 교육내용의 적절성을 확인하였으며 이를 바탕으로 한 3차원 시뮬레이션 바탕의 안전교육 방법을 현실성, 적합성, 능동성 및 흥미유발성에 대한 설문을 통하여 기존 재래식 안전교육보다 효과성이 있음을 확인하였다. Construction worker safety and safety training continue to be main issues in the construction industry. In order to promote safety awareness among workers, it is imperative to develop a more effective and efficient safety training. This study compared two methods in construction worker safety training: 1) a conventional lecture and 2) 3D simulation through Building Information Modeling. Both training methods included the same contents, a selection of safety standard and guide suggested by Occupational Safety and Health Agency and the Korea Occupational Safety and Health Agency; the contents were then produced into two types of training methods. A survey was conducted targeting on safety managers, in which the managers evaluated lifelikeness, active learning and enjoyment that each of training methods can promote. The results of the survey showed that innovative method using 3D simulation was more effective than conventional lecture method in terms of its lifelikeness, active learning and enjoyment. This study will provide implications that innovative method using the virtual reality is more effective than conventional lecture method.

  • Research Article
  • Cite Count Icon 1
  • 10.26470/jcssed.2022.13.2.147
산업재해 예방을 위한 패트롤카 운영현황 및 개선방안
  • Aug 31, 2022
  • Korea CPTED Association
  • Do Woo Kim

With the enforcement of the Serious Accident Punishment Act, interest in industrial sites in preventing industrial accident deaths is increasing. Accordingly, the Ministry of Employment and Labor and the Korea Occupational Safety and Health Agency are conducting on-site inspections of patrols using industrial safety patrol cars with the aim of reducing death accidents. Currently, Patrolcar is conducting regular patrols in dangerous areas, emergency dispatches to the accident site, and on-site inspections, and is actively utilizing Patrolcar's visibility to improve interest and obligation for industrial safety. This study presents policy countermeasures focusing on improvement measures that can increase the visible effect of patrols by analyzing the operation status of the Korea Occupational Safety and Health Corporation related to industrial safety patrol cars.

  • Research Article
  • Cite Count Icon 3
  • 10.35371/kjoem.2010.22.2.154
Effects of Workplace Noise and Hearing Protective Devices on Worker's Speech Intelligibility
  • Jan 1, 2010
  • Korean Journal of Occupational and Environmental Medicine
  • Hyoung Ouk Park + 7 more

Department of Occupational and Environmental Medicine, University of Ulsan, College of Medicine, Ulsan University Hospital, Ulsan, Korea Department of Otorhinolaryngology, University of Ulsan, College of Medicine, Ulsan University Hospital, Ulsan, Korea Occupational Safety and Health Research Institute, Korea Occupational Safety and Health Agency Department of Occupational Health Center, Ulsan University Hospital, Ulsan, Korea

  • Research Article
  • 10.1177/10519815251340978
Development of safety certification standards for semiconductor equipment for prevention of occupational accidents in Korea: A methodology based on semiconductor equipment and materials international (SEMI) standards.
  • May 21, 2025
  • Work (Reading, Mass.)
  • Seung Nam Min + 3 more

BackgroundThe rise of digital devices in the fourth industrial revolution has increased the demand for semiconductor safety. International Safety Certification Standards (SEMI) help prevent accidents in the semiconductor industry, but workers outside of Japan are still at risk.ObjectiveThis study creates safety certification criteria for Korean semiconductor equipment by adapting SEMI standards, local laws, and technical guidelines to reduce facility-related risks.MethodsA self-certification system based on SEMI guidelines was developed through a global standard review, a manufacturer survey, and a Focus Group Interview to valid its applicability.ResultsJapan uses a self-certification system, while other countries depend on SEMI, ISO, and IEC. To ensure domestic semiconductor equipment safety, aligning SEMI standards with Korea's Occupational Safety and Health Act. A survey showed strong reliability (a Cronbach's alpha value of 0.886) with 76.2% favorable and 4.8% unfavorable responses.ConclusionThis methodology allows Korea's semiconductor industry to comply with both domestic laws and SEMI guidelines, strengthening global trade and safety. However, the focus on a specific group of manufacturers and experts has limited research, requiring further validation in actual production environments. Future research should refine its practical application and expand to other high-tech industries.

  • Research Article
  • Cite Count Icon 1
  • 10.14347/kadt.2012.34.4.403
울산지역 치과기공사들의 직무스트레스 요인 평가
  • Dec 30, 2012
  • Journal of Korean Acedemy of Dental Technology
  • Young-Ho Hong + 3 more

Purpose: This study is conducted to evaluate the job stressors for dental technicians in Ulsan city. Methods: The Korean standard job stressors assessment tool developed by Korea Occupational Safety and Health Agency (KOSHA) was used to compare the survey result with Korean reference value. The questionnaire on the social, demographic and job characteristics of dental technicians was also used to find the factors affecting to job stressors by using multiple linear regression analysis. Results: A total of 155 questionnaire was collected from 2010 to 2011. Among the eight fields of stressors, the physical environment (men 50.0, women; 58.3) and job demands (men 57.1, women 57.1) were higher than the median value of the Korean Workers. By multiple linear regression analysis, the significant factors to the physical environment were the satisfaction degree of indoor odor, number of employee, duty and working hours. In terms of the job demand, duty, working hours, age, and the satisfaction to the efficiency of space utilization were significantly associated to the score of job demand. Conclusion: Based on these results, it is necessary to manage appropriate workload, control indoor odor and design an efficient work space for prevention of job stress of dental technicians.

  • Research Article
  • Cite Count Icon 6
  • 10.1007/s12205-023-1978-8
Developing a Field-oriented Analytical Safety Assessment Model for Construction Workers
  • Jul 31, 2023
  • KSCE Journal of Civil Engineering
  • Changsu Lee + 5 more

Developing a Field-oriented Analytical Safety Assessment Model for Construction Workers

  • Research Article
  • Cite Count Icon 2
  • 10.1016/j.shaw.2017.08.001
Development of the KOSHA Proficiency Testing Scheme on Asbestos Analysis in Korea
  • Aug 10, 2017
  • Safety and Health at Work
  • Jiwoon Kwon + 3 more

Development of the KOSHA Proficiency Testing Scheme on Asbestos Analysis in Korea

  • Research Article
  • Cite Count Icon 2
  • 10.35371/aoem.2023.35.e40
The relationship between skeletal muscle mass and the KOSHA cardiovascular risk in obese male workers.
  • Jan 1, 2023
  • Annals of Occupational and Environmental Medicine
  • Hyo Won Chong + 3 more

Efforts for the prevention and management of cardiovascular diseases (CVDs) in workers have been actively pursued. Obesity is one of the important risk factors related to CVDs. Obesity has various metabolic characteristics, and some individuals can be metabolically healthy. Body composition including skeletal muscle mass is known to have protective effect in obesity. The study aims to investigate the association between skeletal muscle mass and Korea Occupational Safety and Health Agency (KOSHA) CVD risk among obese male manufacturing workers in Korea and to identify appropriate indicators of skeletal muscle mass for predicting risk of CVDs. The study was conducted on 2,007 obese male workers at a manufacturing industry aged more than 19 years. Skeletal muscle mass, skeletal muscle index (SMI), skeletal muscle mass percent (SMM%) and skeletal muscle to body fat ratio (MFR) were used to evaluate body composition and these indicators were divided into quartiles. The odds ratios (ORs) and 95% confidence intervals (CIs) for the KOSHA CVD risk groups according to quartiles of skeletal muscle mass indicators were estimated using ordinal logistic regression analysis. The OR for the KOSHA CVD risk groups in the highest quartile of SMI was 1.67 (95% CI: 1.42-1.92), while the ORs for the KOSHA CVD risk groups in the highest quartiles of SMM%, SMM/body mass index (BMI), and MFR were 0.47 (95% CI: 0.22-0.72), 0.51 (95% CI: 0.05-0.76), and 0.48 (95% CI: 0.23-0.74), respectively. We found that high SMI increase the likelihood of high risk of CVDs, while high SMM%, SMM/BMI, and MFR lower the likelihood of high risk of CVDs. Accurate evaluation of skeletal muscle mass can help assess the cardiovascular risk in obese male workers.

  • Research Article
  • Cite Count Icon 28
  • 10.1539/joh.12-0143-cs
Tetramethylammonium Hydroxide Poisoning during a Pallet Cleaning Demonstration
  • Mar 1, 2013
  • Journal of Occupational Health
  • Seung‐Hyun Park + 4 more

The purpose of this study was to examine the cause of an accidental death from acute poisoning resulting from exposure to a cleaner containing tetramethylammonium hydroxide (TMAH) and to consider measures to prevent future cases. The authors examined the details and the reason for the accidental death from acute poisoning based on the autopsy report. The victim was a 39-year-old male researcher with 7 years of work experience employed by a surfactant production company. The accident occurred when he was conducting a field test of a newly developed cleaner, containing 8.75% TMAH solution. The researcher spilled the cleaner on his work clothes in the area of both the hands/arms and legs. He was unconscious when discovered. An autopsy found no damage or injury that could have resulted in death other than burns to 12% of his body, and the cause of death was found to be acute poisoning by TMAH. TMAH is widely used in the electronics industry as a developer or cleaner. It is a dangerous material, causing neurotoxicity leading to respiratory failure by ganglion block that occurs through skin absorption, and no antidote has been developed yet. For this reason, it is best to completely prevent exposure by wearing proper personal protective equipment. Despite this fatal toxicity of TMAH, it is not classified in Korea as a "chemical requiring legal control". For this reason, it is urgent to raise awareness of the toxic properties of TMAH to prevent additional cases of TMAH poisoning

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  • Research Article
  • Cite Count Icon 27
  • 10.3390/ijerph18168407
The Impact of COVID-19 Pandemic on Workplace Accidents in Korea.
  • Aug 9, 2021
  • International Journal of Environmental Research and Public Health
  • Eun-Mi Baek + 2 more

(1) Background: Although the number of people infected with COVID-19 has increased over time, its effects on workplace accidents are still poorly understood. On the one hand, COVID-19 can reduce workplace accidents through contracted economic activities or changes in work methods. On the other hand, it can increase workplace accidents by spreading in the workplace. The main purpose of this paper is to examine how COVID-19 affected workplace accidents in Korea during the early part of the pandemic. (2) Methods: This paper utilizes the administrative data on workplace accidents in Korea collected by Korea Occupational Safety and Health Agency. In particular, we use monthly data from February 2016 to August 2020. This period was chosen to rule out the effect from the Middle East Respiratory Syndrome outbreak in 2015 and to include COVID-19 effects in 2020, given the available data. To examine the impact of COVID-19 on workplace injury and illness, we estimate fixed effects regression models, allowing us to control for group and time effects. (3) Results: COVID-19 was generally found to reduce workplace accidents in Korea, particularly through a reduction in occupational diseases. However, we also found that COVID-19 increased occupational injuries for males and workers in the transportation industry. We provide some evidence that these workers experienced an increase in workload and were unable to change work methods including working from home during the COVID-19 pandemic. (4) Conclusions: Our results indicate that to reduce workplace accidents, government interventions should be directed at workers who are unable to change work methods and who are likely to suffer an increase in work burden due to COVID-19.

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