Nanotechnology research facility‐ A vibration and noise control design case study

Abstract

Vibration and noise control would be critical to the success of a proposed nanotechnology and molecular research facility. Roadway traffic, a nearby power generation plant and buildings in the vicinity were potential sources of ground borne vibration disturbances. Mechanical equipment, occupant installed support apparata and occupant activities were potential sources of internally generated vibration disturbances. On‐site ground borne vibration was measured for comparison with generic floor vibration criteria for sensitive installations. Results were analyzed relative to criteria for potential disturbance of sensitive equipment, perception by occupants, audible radiated structure borne noise in acoustically sensitive spaces and resolution‐degrading motion for scanning and for transmission electron microscopes and other nanotechnology clean room equipment. Design guidelines and structural vibration control concepts were recommended to the structural engineers, including de‐tuning, damping and isolation methods. Recommendations were provided for mechanical noise control and vibration isolation. Architectural noise control, sound isolation and room acoustics guidelines were provided for research, office and meeting spaces. This case study will discuss the desired vibration and noise control objectives and the design solutions that were implemented. Building photographs will be presented. Post‐construction measurement results will be graphically compared with pre‐construction conditions to demonstrate apparent degree of success in mitigating vibration.