Abstract
A new coplanar gas sensor array of ZnO was fabricated by injecting different volumes of 0.01 mol/L AlCl 3, CuCl 2, SnCl 4, TiCl 4, PdCl 2 and WCl 6 solutions and post treatment to improve the selectivity in liquor. The new four-sensor array was optimized by maximizing Sum of Euclidean distances (SED) of the gases of liquor. The morphology of films was characterized by field-emission scanning electron microscopy (FESEM). The results showed that ZnO nanostructures were formed on the surface of films after the injecting process. Nanowires, 100 nm in diameter and 3 μm in length, were found when the solutions included AlCl 3, CuCl 2, SnCl 4 and PdCl 2. However, when the injecting solution was TiCl 4, nanotowers with 500 nm in diameter and 4 μm in length appeared. No new structures appeared when the WCl 6 solution was injected. The results of testing gases of liquor revealed that the injecting process could improve the response of the sensors array effectively. Through calculating the value of the SED, the best array was confirmed whose SED value would be three times the worst one.
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