Abstract
A high-density plasma in a pin-to-pin configuration was sustained in liquid organosilicon precursors (hexamethyldisiloxane, tetraethyl orthosilicate, and tetramethylcyclotetrasiloxane) by the application of a high-voltage at a frequency of 1 kHz and a duty cycle of 30%. For all organosilicon precursors investigated, the current-voltage characteristics revealed a spark mode, with typical discharge duration of about 50 ns. Both the number of microdischarges and the total amount of charges per microdischarge increased with the amplitude of the applied voltage. The optical emission spectroscopy revealed strong emission from the C2 Swan system along with H I, Si I, and O I emission lines, indicating very high fragmentation levels of the organosilicon precursors upon discharge ignition. This was confirmed by Transmission Electron Microscopy and Energy-Dispersive X-ray spectroscopy indicating the formation of amorphous silicon oxycarbide nanoparticles. However, W I emission lines as well as W crystalline nanoparticles could also be seen; a feature ascribed to plasma-electrode interactions.
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