Abstract
The Nanomechanical characteristics of InP epilayer grown on GaAs (100) substrate is studied. The mechanical characteristics of the material such as hardness, modulus of elasticity, stiffness, contact depth etc. were studied by Nanoindentation technique with different probe geometries like Berkovich and Vickers. The results show significant variation in the mechanical parameters with respect to the tip geometry and the measured hardness values were observed to increase with the applied load.
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