Abstract
In this work, quasi-static and dynamic tests for the mechanical properties of SU-8 using a nanomechanical triboindenter were performed. Load–displacement data for the indenter as it is driven into and withdrawn from the photoresist patterns are reported. Berkovich-shaped indenter was used in the experimental measurements of the following mechanical properties: reduced elastic modulus, hardness, energy storage modulus and energy loss modulus. The Young’s modulus of the SU-8 photoresist was also determined.
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