Abstract
In article number 2000794, Yong Xie, Philip X.-L. Feng, and co-workers demonstrate the additive and heterogeneous integration of 2D nanoelectromechanical systems (NEMS) onto micro actuators made of mainstream silicon-on-insulator (SOI) comb-drive microelectromechanical systems (MEMS), across several orders of magnitude in length scale, thus enabling a chip-scale platform for strain engineering of 2D crystals, and for broad frequency tuning and quality (Q) factor enhancement in atomically thin NEMS resonators.
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