Abstract
In this paper we studied the surface morphology of the grating fabricated on the soda-lime silicate glass using a 500 kHz, 1040 nm femtosecond laser. A nanocluster-ripple grating can be fabricated with proper processing parameters. Our results demonstrate that the scan line spacing plays an important role in the diffraction efficiency of the fabricated grating. Such gratings, used as a multi-beam splitter or a dispersion element, can be fabricated easily by changing the laser scan line spacing.
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