Abstract
Spinning rotor gauges are used widely as transfer and reference gauges for gauge calibration in high and middle vacuum. Causes of error in pressure measurements by the gauge were discussed. Change in offset was measured and analyzed. A spinning rotor gauge was calibrated from 10-4 to 1 Pa using another spinning rotor gauge as a reference. The dispersion of measured values was the dominant cause of the uncertainty at pressures less than 10-2 Pa. The lowest value of the standard deviation was 3×10-7 Pa. Judging from this value, the lower limit of reliable measurement by the gauge is 3×10-5 Pa.
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