Abstract
Epitaxial growth of Fe films on Si(l00), Si(110), and Si(111) substrates was achieved by dc facing targets sputtering. The substrate de bias was found to be an important parameter for achieving epitaxial growth. When this bias was not applied, no epitaxial films were obtained except on the Si(111) substrate. Electron diffraction and X-ray rocking curve measurement confirmed that the epitaxial relationship for Fe(111)/Si(111) was B-type (twinned epitaxy). The in-plane anisotropy for Fe(l00)/Si(l00) and Fe(111)/ Si(111) was explained as megnetocrystalline anisotropy. However, the anisotropy for Fe(110)/Si(110) was different from that for bulk Fe.
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