Abstract
To take a detailed characteristics of a surface topography for X-ray or laser mirrors, STMs (Scanning Tunneling Microscopes) have been found to be very useful, owing to their ultra-high spatial resolution. However, conventional STMs are not sufficiently useful for this industrial purpose, because of the small measurement area involved. The authors developed a Wide Range STM using monolithic mechanisms and have developed a wider range and easy to use STM. In this new instrument, a sample is scanned in lateral directions with divided electrodes bimorph PZTs. This furnishes the ability to achieve 200 μm×63 μm scan range and that an actual mirror, such as one which has a 50 mm diameter, can be set on the sample stage. It is possible to successfully measure a grating, whose pitch is 0.42 μm over about 200 μm scan line. Also, a diamond turning mirror was measured over an about 45 μm×2.5 μm area tentatively. The resolution for this one is 4 nm vertically, at the most. These measurements reveal the saw wave topography of the grating and considerable detail on diamond turning marks on the mirror surface. The proposed new STM is very useful, because this measurement gives more information, exceeding the amount available using contact stylus methods and optical methods.
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