Abstract
In this paper, the scanning force microscope (SFM) using optical heterodyne interferometry is reported. The birefringent double-focus lens was used as a beam splitter-recombiner, and thus, the two interfering beams passed through a common optical path and the reference plane of the interferometer was located on the sample surface. Therefore, the deflection of the cantilever was detected without being affected by the irregular movement of the stage and the environmental conditions, such as thermal and vibrational disturbances. Since the SFM system was combined with a laser interferometric microscope and a conventional optical microscope, the sample was positioned easily by the visual inspection, and it was measured by the laser interferometry.
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