Abstract
Properties of magnesia stabilized zirconia (MSZ) electrolyte thin films for solid oxide fuel cells (SOFCs), which were grown by the plasma-enhanced chemical vapor deposition (PECVD) method, have been investigated on the microwave power dependencies and the anneal effect. MSZ thin films grown by microwave power of 500 W were found to be the columnar and closed electrolytes having a higher conductivity of 10-3 S/cm. A SOFC having the annealed MSZ electrolyte thin films indicated a stable power generation property with 0.5 V although its value was reduced to lower half than the theoretical OCV of 0.915 V.
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