Abstract
<para xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> This paper presents a new self-consistent multisubband Monte Carlo model for electronic transport in the inversion layer of decananometric MOSFETs. The simulator is 2-D in real space and in <formula formulatype="inline"> <tex>$\vec{k}$</tex></formula>-space and accounts for the electron-gas degeneracy in the <formula formulatype="inline"><tex>$\vec{k}$</tex></formula>-space. Simulation of nanoscale ultra-thin-body silicon-on-insulator MOSFETs shows that the subband structure and the carrier degeneracy strongly affect the transport properties and, in particular, the injection velocity and the channel back-scattering. </para>
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