Abstract
Multidisciplinary design optimization (MDO) is a methodology for the design of complex system, the aim of which is to emphasize the interaction between the several disciplines in their respective design optimization. Considering the problem of coupling between several different disciplines in the design of micro electro mechanical systems (MEMS), MDO method is introduced to handle this problem. In studying multi-disciplinary character and current design status of MEMS, a novel MDO framework for MEMS - MMDOS is established, and four kinds of method of MDO are presented, which will help to raise the design level and improve the product quality.
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