Multi-scenario refractive index sensor based on merging BIC in an all-dielectric metasurface

Abstract

In recent years, bound states in the continuum (BICs) in the all-dielectric metasurfaces have attracted considerable attention due to the low radiation loss and large quality factor (Q-factor). In this study, we design a highly sensitive refractive index sensor working in multi-scenario based on merging quasi-BIC in the silicon nitride metasurface. By adjusting the thickness of the metasurface and keeping the structural symmetry, nine BICs distributed in momentum space form the merging BIC at the Γ point with significantly enhanced Q-factor. The transmission spectra of the metasurface sensor disperse with the refractive index in multi-scenario. The modulation depth of the Fano resonance spectrum can exceed 99.9%. The sensitivity and figure of merit of the refractive index sensor based on the merging quasi-BIC can reach 41.35 nm/RIU and 13,389.1 RIU-1 for gas, 59.05 nm/RIU and 8,415.9 RIU-1 for blood, and 66.08 nm/RIU and 8,845.8 RIU-1 for cerebrospinal fluid, respectively. Furthermore, we investigate the influence of the structural deviations on the Q-factor, which of the merging quasi-BIC maintains higher than that of the isolated quasi-BIC. Our work offers a method for designing high-sensitivity sensors working in multi-scenarios, which may hold significant potential for enhancing device performance in gas and biological detection.