Abstract
Fe x N (1.6<x<2.2) is produced by RF-sputtering of pure iron under high purity argon and nitrogen atmosphere. Abundances of Fe, N, O and C are analyzed by proton deep elastic scattering, while X-ray photoelectron spectroscopy (XPS) is used to detect the oxidation of iron. Mössbauer spectroscopy was used to characterize the samples as-sputtered and after annealing at 200°C, 250°C and 300°C for 30 minutes, respectively. X-ray diffraction and Mössbauer results show that for the chemical ratio of iron in Fe x N approaching 2, orthorhombic ζ-Fe 2N will transform into hcp ε-Fe x N or quasi-ZnS type structure with an increase of nitrogen content in the sputtering atmosphere or after annealing. The first neighbor shell of iron is either rich or depleted of nitrogen in ε-Fe 2N.
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