Morphological Characterization of Sb-Doped SnO2 Thin Films Developed by Spray Pyrolysis

Abstract

In the present work, we have successfully deposited Sb antimony doped tin dioxide (SnO2) thin films with different concentrations (0 at%, 1 at%, 3 at% and 5 at%) from a stannous (II) chloride dihydrate solution (SnCl2.2H2O), by the pyrolysis chemical spray deposition technique on ordinary microscope glass substrates preheated to a fixed temperature of 350 °C. After deposition, the films were annealed at temperatures 400 °C for 4h. The aim of this work is on the one hand to study the morphological properties of pure and doped tin dioxide thin films and to determine the different morphological parameters such as: the roughness Ra, Rq and on the other hand to study the effect of Sb doping on the morphological properties of SnO2 thin films. To achieve this purpose, the thickness of all the films was estimated by profilometer with standard scan type. The morphology of the films was examined by atomic force microscope (AFM) in contact mode at room temperature to visualize the surface of our samples (the structure, size and morphology of crystallites ... etc). The 2D and 3D AFM images confirm the formation of nanostructures on the surface, with shapes and dimensions influenced by the amount of antimony doping. All the samples show a polycrystalline morphology, and the grain size progressively decreases with the increase of the Sb concentration (1% and 3%). On the other hand, for high antimony doping (5% Sb) the grains are larger than those observed at 3% doping. The root mean square (RMS) surface roughness values for samples with Sb concentrations (5%) were found to be 8.334 nm.