Monolayer M N H 2 ( M , N = C, Si, Ge): Enabling sub-5-nm MOSFETs compatible with silicon-based manufacturing

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Monolayer <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"> <mml:mi>M</mml:mi> <mml:mi>N</mml:mi> <mml:msub> <mml:mrow> <mml:mrow> <mml:mi mathvariant="normal">H</mml:mi> </mml:mrow> </mml:mrow> <mml:mn>2</mml:mn> </mml:msub> </mml:math> ( <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"> <mml:mi>M</mml:mi> <mml:mo>,</mml:mo> <mml:mi>N</mml:mi> </mml:math> = C, Si, Ge): Enabling sub-5-nm MOSFETs compatible with silicon-based manufacturing