Abstract
For describing the organic compound physisorption on a silicon surface, a method for systematically obtaining the physisorption and desorption rate constants of organic compounds was developed. Additionally, an equation for describing the surface concentration of organic compounds in a steady state was derived, taking into account the rate constants of physisorption and desorption and the molecular interaction radii for occupying the silicon surface. In a three-component system consisting of isopropyl alcohol, diethylphthalate, and octanol, the calculated surface concentrations showed a correlation to that of the in situ measurement using a quartz crystal microbalance. Thus, the equation obtained in this study is expected to predict an airborne organic contamination behavior in a multicomponent system.
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