Abstract

This article reviews the development of a new category of motion sensors including linear and angular accelerometers and seismometers based on molecular electronic transducer (MET) technology. This technology utilizes a liquid not only as an inertial mass, but also as one of the main elements in the conversion of mechanical motion into electric current. The amplification process is similar to that in a vacuum triode. Therefore, it is possible to achieve signal amplification close to 108. Motion sensors demonstrating wide frequency and dynamic range and sensitivity that are one to two orders of magnitude better than MEMS devices of the same size have been developed.

Highlights

  • Motion sensors, including accelerometers and gyroscopes, provide measurement of movement in at least six degrees of freedom

  • The restoring force to the liquid inertial mass is provided by the rubber membranes which are located at the two ends of the channel to seal the electrolyte, and the damping force is caused by hydrodynamic resistance of the electrolyte as it flows through the sensing element

  • Molecular electronic transducers comprising a simple set of four-electrodes, a liquid-state electrolyte as inertial mass and housing show excellent ability to be applied in motion sensors, including linear/angular accelerometers, gyroscopes and seismometers

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Summary

Introduction

Motion sensors, including accelerometers and gyroscopes, provide measurement of movement in at least six degrees of freedom. The design and fabrication of these solid-state MEMS devices are complicated, which can result in low reliability, low reproducibility, and high cost They have yet to prove satisfactory for specific applications, especially in low frequency seismic sensing, because of the inherent limitation of the working mechanism of the solid-state mass-spring system. For some applications they have limited successes due to their fragility to high shocks. The advantages of MET motion sensors include their small size, lack of fragile moving parts ( high shock tolerance), high sensitivity and low noise especially at low frequencies, and independence of the response on installation angle

Molecular Electronic Transducer-Principle of Operation
Transfer Function
Feedback Subsystem
Thermohydrodynamic Self-Noise
Convection-Induced Self-Noise
Geometry Self-Noise
Shot Noise
Electronic Self-Noise
Different Types of MET Motion Sensor
Conclusions
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