Abstract
Hydrogen-free carbon film deposition is studied through molecular dynamics (MD) simulation. MD simulation is performed for low-energy carbon particle impacts on carbon surfaces at room temperature. Deposition energy is considered up to E=100eV per carbon atom. Deposited surface is set into amorphous, and (111) surface of diamond crystal is considered in order to compare. For (111) surface, we found three characteristic regions. The deposition frequently results in the shallow trapping in E⩽20eV. In E⩾30eV, the deep trapping occurs about normal incidence, and the reflection appears about grazing incidence. For the amorphous surface, however, the reflection and the deep trapping are suppressed.
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