Abstract
Molecular dynamics simulations were performed to study the growth of Cu films on a Mo(1 1 0) substrate, both by thermal evaporation and by ion-beam assisted deposition (100 eV Ar assistance). The growth mode of the Cu films goes to a 2D–3D–2D transition; the evolving microstructures are also discussed. The influence of the energetic ion impacts is significant, notably affecting wetting phenomena, but also leading to a different film structure. The effects of 75 eV He ion irradiation of a few completed films are also investigated, to help assessing the information on the defect state of the deposited films that is provided by thermal helium desorption experiments.
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