Abstract
This paper presents the design and Finite Element Model (FEM) simulation of a novel electrothermal microactuators and arrays. It is a single material microactuator which deflects at its tips by differential thermal expansion of its constituent parts. The electrothermal actuator consists of three thin arms, three thin blades and two electrical connection pads. The goal of this coupled electrothermal actuator design was to multiply the force by adding the individual contributions of all the three actuators. The difference in magnitude of blade deflections depends on the geometrical characteristics of the actuators. The thermal deformation and thermal stability are easily controllable. The simulation employing ANSYS/Multiphysics software results include force, deflection, thermal stress, ideal electrothermal actuator and array geometries. The main advantage of this electrothermal actuator is large deflection of blades with very low actuation voltage in comparison with electrostatic actuators. A typical application in a micromirror is shown to illustrate the utility of these actuators and arrays.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
