Abstract

This paper reports the numerical simulation of Dielectric Barrier Discharge (DBD) for Kr-Xe excilamp. The model of the discharge consists of three main modules: a plasma chemistry module, a circuit module and a Boltzmann equation module. The results predict the optimal operating conditions and describe the electrical and chemical properties of the KrXe* excimer lamp.

Highlights

  • The discharge lamps sources of UV and VUV radiation are mainly lamps with mercury vapour 1-3

  • This paper reports the numerical simulation of Dielectric Barrier Discharge (DBD) for Kr-Xe excilamp

  • The present work represents a study of the kinetics for a Kr-Xe lamp pumped by a Dielectric Barrier Discharge DBD at high pressure

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Summary

Introduction

The discharge lamps sources of UV and VUV radiation are mainly lamps with mercury vapour 1-3. Excimer lamp can be pumped by pulsed 16-21 or dc longitudinal discharges [22], by pre-ionized pulsed transverse discharges [23], by microwave discharges [24] or by dielectric barrier discharges [25-26]. The plasma is homogeneous and represented by a variable resistance whose conductivity is proportional to the electron density. The electron continuity equation is simultaneously resolved with the kinetic equations describing the time evolution of specie concentrations.

Results
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