Abstract
In the duty-off period of a pulse-modulated inductively coupled plasma at low pressure (200 mTorr), both an increase in the argon metastable densities and a stronger increase in the highly excited state emission are observed by time-resolved optical absorption and emission spectroscopy. To understand the behavior in Ar afterglow, a simple time-dependent volume averaged global model is developed. The particle and power balance equations are applied to determine the time evolution of the charged particles and the neutral dynamics. To compare the pressure-dependent mechanisms in the afterglow, two pressures are investigated: 10 and 200 mTorr. The electron temperature, the electron density and the densities of the Ar excited states obtained by the simulation showed relatively good agreement with experiments. We discuss the dominant creation sources and the routes of loss for each level during the discharge and in the afterglow. The calculation indicates that the population of the argon highly excited state and the intense emission in the afterglow are mainly produced by three body electron–ion recombination (Ar+ + e + e → Ar** + e).
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