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https://doi.org/10.1109/tsm.2025.3558328
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Translate Chat PDFNEWCiteExportShare Publication Date: May 1, 2025 |
Modeling and Designing a GaN-Growth Reactor With Halogen-Free Vapor Phase Epitaxy: NH<sub>3</sub> Decomposition at the Catalytic Surface of Components to Replicate Parasitic Polycrystal Formation
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