Model for a transformer-coupled toroidal plasma source

Abstract

A two-dimensional fluid plasma model for a transformer-coupled toroidal plasma source is described. Ferrites are used in this device to improve the electromagnetic coupling between the primary coils carrying radio frequency (rf) current and a secondary plasma loop. Appropriate components of the Maxwell equations are solved to determine the electromagnetic fields and electron power deposition in the model. The effect of gas flow on species transport is also considered. The model is applied to 1 Torr Ar/NH3 plasma in this article. Rf electric field lines form a loop in the vacuum chamber and generate a plasma ring. Due to rapid dissociation of NH3, NHx+ ions are more prevalent near the gas inlet and Ar+ ions are the dominant ions farther downstream. NH3 and its by-products rapidly dissociate into small fragments as the gas flows through the plasma. With increasing source power, NH3 dissociates more readily and NHx+ ions are more tightly confined near the gas inlet. Gas flow rate significantly influences the plasma characteristics. With increasing gas flow rate, NH3 dissociation occurs farther from the gas inlet in regions with higher electron density. Consequently, more NH4+ ions are produced and dissociation by-products have higher concentrations near the outlet.