Abstract
The growth of heteroepitaxial layers causes stress across the interface which in a certain range of layer thickness may he relaxed by the formation of misfit dislocations at the interface. Systematic investigations of such misfit structures by transmission electron microscopy (TEM) have previously heen conducted only on systems with a relatively large misfit parameter f, i.e. with a high dislocation density. However, this case presents difficulties in the analysis because of the complexity of the dense structures.Interfaces containing a low density of misfit dislocations, e.g. heteroepitaxial systems with low misfit, should consequently be investigated. High voltage electron microscopy (HVEM) enables us to study specimens of several μm in thickness and offers decisive advantages over 100 kV TEM: i) generally, specimens can he prepared by thinning the substrate only, ii) thick foils are mechanically stable, which allows the preparation of specimens with an electron transparent area of several mm2.We report here new results on the initial formation of misfit dislocation structures in the heteroepitaxial system Ge on GaAs (f = 0.074%).
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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