Abstract
A novel miniaturized piezoelectric actuator operating in bending hybrid modes is reported in this work. It provides a way to reduce the size of piezoelectric actuator and shows potential application in small system. We use two orthogonal 1st bending modes of a symmetrical beam to produce elliptical movements on two driving feet; therefore, the design and fabrication process of the proposed piezoelectric actuator is quite easy. The side surfaces of the end tips are selected as the driving parts as the bending vibration can generate higher transverse displacement, which means that the axial movement of the end tip is unused as its lower amplitude. Parameters of the prototype is as follow: length of 34mm, cross section of 10.5mm×10.5 mm, weight of 7.0g, working frequency of 54.2kHz, maximum no-load speed of 392mm/s and maximum thrust of 1.2N.
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