Abstract
A miniaturized infrared sensor based on the principle of the Golay cell has been developed. The sensor has a gas chamber and a parallel planar capacitor consisting of a thin diaphragm formed by silicon bulk micromachining. Illumination with infrared light heats the gas in the chamber and then the deflection of the diaphragm induced by the expansion of the gas is detected as a capacitance change of the capacitor. The chamber of our device is completely sealed and can be filled with various kinds of gas. The sensor containing a certain gas shows a specific response of the intrinsic absorption spectrum of the ambient gas. Selective detection of ambient gas has been confirmed using various sensors containing different gases.
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