Abstract
Abstract Fiber optic pressure sensors have attracted considerable attention because of their small size, high sensitivity and immunity to electromagnetic interference. Here, a miniature absolute pressure sensor at the edge of a fiber is presented. Contradictory to earlier pressure sensors with membranes at the fiber tip (in a co-axial configuration), we present a sensor in a cross-axial configuration. It is optimized for aerodynamic pressure measurements in turbo–machinery. The sensor is fabricated by thin film deposition techniques and focused ion beam (FIB) microfabrication and uses multilayer Fabry-Perot (FP) interferometry as sensing principle. The reflected power intensity of the prototype is experimentally verified to be 0.77%/bar.
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