Abstract

In situ material identification and object tracking have been demonstrated using a mid-infrared (mid-IR) robotic scanning system. This detection method is capable of inspecting materials noninvasively because the mid-IR spectrum overlaps with numerous characteristic absorption bands corresponding to various chemical function groups. The scanning system consisted of a fiber probe connected to a mid-IR tunable laser with a wavelength tuning range of λ = 2.45-3.75 μm. For the high-speed performance of the scanning system to be evaluated, a testing platform was constructed with an object plate rapidly rotating at ω = 231 rpm. The objects on the plate were SU-8 epoxy-based resin and polydimethylsiloxane, which were mid-IR absorptive while visibly transparent. Applying mid-IR multispectral scanning, the system was able to simultaneously track the object position and identify the composition by interpreting the spectral and spatial intensity variation. The mid-IR robotic scanning method thus provides a visualization system critical for process inspection in automatic manufacturing and high-throughput biomedical screening.

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