Abstract
Mid-infrared photonics is a widely researched field with several applications, such as chemical sensing and spectroscopy. The development of photonic integrated circuits for the mid-infrared can enable the reduction in device size, weight, and power (SWaP) consumption. This paper demonstrates arrayed waveguide gratings working in the mid-infrared regime (5–5.4 µm). Our devices are fabricated on an InP-based quantum cascade laser platform with the gain medium as the waveguide core. To minimize the propagation losses caused by free carrier absorption and intersubband absorption in the unbiased QCL structure, we exposed the photonic chips to proton implantation. The performance of three sets of AWGs with different etch depths was characterized. The lowest waveguide losses were measured to be 2 dB/cm. The best performing 7×1 AWG and 13×1 AWG designs featured insertion losses of −2dB and −2.5dB, respectively. This study showcases the feasibility of applying such a platform for easy integration with active components like lasers and photodetectors, paving the path for on-chip mid-infrared applications.
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