Abstract
A wide dynamic range reflective mode displacement sensor is designed in this article based on the resonance frequency shift. The linearity of the sensor is enhanced using a tapered metallic patch that forms the capacitance of the sensor, leading to a better dynamic range. The sensor is designed using a coplanar waveguide (CPW) terminated with a series <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$RLC$ </tex-math></inline-formula> resonator with <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$R=50\,\,\Omega $ </tex-math></inline-formula> . A movable dielectric slab is placed above the capacitive patch of the resonator, where displacing the dielectric slab modifies the overall capacitance of the resonator causing a shift in the resonance frequency. The sensing principle is analyzed in detail, using an accurate circuit model and full-wave electromagnetic simulations. The proposed sensing method is capable of detecting the displacement direction. Furthermore, the sensing concept can be extended to a 2-D displacement sensor as well. The sensing approach and the design concept are verified through the fabrication and measurement of a sensor prototype.
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