Abstract
This paper reports a reduction of microvalve leakage based on precise measurements of leak and flow rates. The tight contact between a valve cap and seat, which is obtained by nanometer-scale flat surfaces and by self-alignment of the cap and seat-bore, makes the leakage from a microvalve ultra-low. The leak and flow rates are determined by precisely measuring pressure changes when introducing helium gas into a flow line. We have, consequently, attained a leak rate as low as 5.8/spl times/10/sup -10/ Pa.m/sup 3//s and a flow rate ranging from 4.0/spl times/10/sup -6/ to 3.2/spl times/10/sup -4/ Pa.m/sup 3//s.
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