Abstract
The phase state of lead-zirconate-titanate thin films, obtained by a two-stage technology, at the morphotropic phase boundary is studied by electron backscatter diffraction and by measuring the temperature dependence of their dielectric constant. It is shown that depending on the working-gas pressure and the heat-treatment temperature, the volume ratio of the tetragonal and monoclinic modifications of the ferroelectric phase, which coexist at room temperature, varies. The nature of the observed variations is discussed.
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