Abstract
A series of GaAs/AlxGa1-xAs MBE structures, in which x ranged from 0.10 to 0.40, was studied using microscope spectrophotometry (MSP). The MSP reflectance measurements were found to be extremely sensitive to compositional variation, with a clear inverse relationship between Al content and reflected intensity, and a sympathetic relationship between composition and dispersion. Theoretical optical models were simulated and fitted to the measured data to give layer dimensions which fitted remarkably well with SIMS data. It is concluded that MSP has great potential for the non-destructive metrology and quality control of simple and complex multilayer structures.
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