Abstract
A modified chemical vapour deposition (CVD) and electrochemical vapour deposition (EVD) technique is developed to prepared microporous or dense ceramic membranes by modifying ultrafiltration alumina membranes. Using this CVD/EVD technique, thin (2-5μm) or very thin (0.2-1μm) dense gastight yttria stabilized zirconia films which are oxygen semipermeable were grown on various types of porous substrates. The surface properties and pore size of the top layer of the alumina membranes were modified by depositing a zirconia/yttria solid solution on the internal pore surface of the membrane top layer in order to obtain gas separation properties of surface diffusion or microporous diffusion.
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