Abstract
A micromachined diaphragm structure for integrated ultrasonic transducers is discussed. The micromachining significantly reduces a large parasitic capacitance, resulting in improved sensitivity compared with identical transducers on solid substrates. For the particular geometry tested, sensitivity improved 8.9 dB; this result matches a prediction of 10.9 dB, based on a simple model, reasonably well. This level of improvement is considered significant for the applications under consideration (medical imaging and nondestructive evaluation).< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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