Abstract
The first micro-structures produced at Elettra (Trieste, Italy) with deep x-ray lithography are presented in this work. The most important details concerning LIGA technique and in particular deep x-ray lithography using synchrotron radiation are described. The scanning electron microscopy images of test micro-structures made of polymethylmethacrylate characterized by a height of 200 μm and lateral dimensions in between 10 μm and 200 μm are presented. In all the considered cases good accuracy with high aspect ratios and nanometric roughness is observed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
