Abstract
Cr/Au meander-shaped resistors were fabricated on 0.2 μm thick square-shaped silicon nitride diaphragms with diaphragm dimensions ranging from 0.775 to 2.275 mm. The performance of these sensors was measured in a vacuum chamber as a function of resistor powers from 0.5 to 3 mW at pressures ranging from 2×10−4 to 760 Torr. The lengths of the meander-shaped resistors increase from 5.5 mm for the 0.775 mm diaphragm to 33.6 mm for the 2.275 mm diaphragm devices. It is shown that the pressure dependence of the devices is governed by the kinetic gas theory and that the devices can measure pressures from about 10 to 1×10−3 Torr. At a resistor power of 2 mW at 760 Torr, the 2.275 mm diaphragm device, which has the largest sensing area, exhibits the highest sensitivity.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.