Abstract
A micro-device vibration measurement method based on microscopic speckle interferometry combined with orthogonal phase is presented. This method utilizes the approximate linear distribution characteristics of orthogonal points (points satisfying the condition that the initial phase difference equal to π/2) to quickly obtain the vibration information of the measured object. Compared with common optical measurement methods, this method does not require scanning imaging and can realize real-time full-field measurement. Moreover, the measurement principle and equipment is simple, so there is no need to introduce a stroboscopic light source or heterodyne device.
Highlights
With the increasing requirements for the functionality and miniaturization of electromechanical devices, the application of microelectromechanical systems (MEMS) and nanostructured devices has become more and more important
Optical interferometry has the advantages of non-contact, high accuracy, and direct measurement of micro-vibration, so they have been widely used
Reported a stroboscopic white light interferometer used to measure the surface acoustic wave generated by a ring-shaped transducer with a working frequency of 74 MHz
Summary
With the increasing requirements for the functionality and miniaturization of electromechanical devices, the application of microelectromechanical systems (MEMS) and nanostructured devices has become more and more important. Optical interferometry has the advantages of non-contact, high accuracy, and direct measurement of micro-vibration, so they have been widely used. V. et al [3] demonstrated a homodyne scanning Michelson interferometer, which can directly measure the surface. G. et al [4] used Mach–Zehnder interferometer to measure the vibration of high frequency thin film resonators. The frequency range is from 5 kHz to 35 MHz. The Bessel function method is used for theoretical calculation, so the maximum amplitude that can be measured is far less than the wavelength of the light source. Reported a stroboscopic white light interferometer used to measure the surface acoustic wave generated by a ring-shaped transducer with a working frequency of 74 MHz. The maximum vibration amplitude was 3 nm.
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