Abstract
This paper reports a novel top-down/bottom-up combined resonant microcantilever chemical sensor, where the nanosensing material of a functionalized mesoporous thin film (MTF) is directly self-assembled on the sensing region of the integrated microcantilever. By using the batch-producible nano-on-micro construction technique, a large number of such sensors can be batch fabricated with uniform performance and low cost. More importantly, the sensing molecule terminals can be simultaneously constructed at the pore inner surface when the MTF is directly grown on the cantilever. With -NH <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> -group-functionalized MTF directly grown onto the surface of the cantilever free end, the micro-/nanocombined gravimetric sensor has experimentally exhibited quick response and highly sensitive detection of CO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> gas.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
