Abstract
Surface acoustic wave (SAW) gravimetric sensors have been widely applied in the field of chemical and biological detections for decades. However, it is noticed that the operating mechanism of this type of sensors is not understood well. A perturbation theory commonly adopted has been used to predict the mass sensitivity of the SAW sensors, but, as indicated also, “there is a significant and systematic quantitative discrepancy” between the theoretical and experimental results [Wohltjen, et al. IEEE UFFC, 1987]. In this paper, a micro load theory is presented. The coating film with biochemical material adsorbed is not regarded as a perturbation source, but a micro mechanical load. Then, it is revealed that the fractional frequency shift caused by the load is minus and half of the fractional area density change, where the unloaded area density is a product of the substrate material’s density and SAW wavelength. Also, it is interesting to note that the expression is the same with that for Lamb wave sensors if...
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